Title:
容量型センサ
Document Type and Number:
Japanese Patent JP2007502416
Kind Code:
A
Abstract:
A capacitive sensor including a housing having a hermetically sealed cavity, a plate in the cavity, a diaphragm forming a part of the cavity and spaced from the plate, a conductive layer on the first diaphragm, and a second conductive layer on the plate, the first and second conductive layers being the electrodes of a capacitor whose capacitance varies with the position of the diaphragm relative to the plate.
Inventors:
John Oudaud
Damen Joseph McCartney
William Hunt
Immon highness
John M Wine
Patrick Crowley
John Earl Martin
Damen Joseph McCartney
William Hunt
Immon highness
John M Wine
Patrick Crowley
John Earl Martin
Application Number:
JP2006523296A
Publication Date:
February 08, 2007
Filing Date:
August 10, 2004
Export Citation:
Assignee:
Analog Devices Inc.
International Classes:
G01L9/12; B60C23/04; B60C23/20; G01L9/00; G01L13/02; G01L13/06; G01L17/00; G01L19/04; G01P15/125; G01L
Domestic Patent References:
| JPS58731A | 1983-01-05 | |||
| JPH04204339A | 1992-07-24 | |||
| JPH10239193A | 1998-09-11 | |||
| JP2001013026A | 2001-01-19 | |||
| JPH0635935U | 1994-05-13 | |||
| JPS62115110U | 1987-07-22 | |||
| JP2003050173A | 2003-02-21 | |||
| JPH09257833A | 1997-10-03 |
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro