Title:
CARBON COMPOSITE MEMBER
Document Type and Number:
Japanese Patent JP2008222456
Kind Code:
A
Abstract:
To provide a carbon composite member which is hard to slide, excellent in workability, and usable as a member for semiconductor manufacturing apparatus.
The carbon composite member 1 is composed of a carbon base material 10 and a pyrolytic carbon layer 11 formed on the carbon base material 10. Projections 12 are formed on the surface of the pyrolytic carbon layer 11, wherein the projections 12 are formed by crystal growing the pyrolytic carbon around carbonaceous powder 13 as nuclei, the minor axes of the projections 12 are in the range of 5-3,000 m, and the surface density thereof is in the range of 102-108/m2.
Inventors:
TAKAGI TAKASHI
YASUDA MASAHIRO
YASUDA MASAHIRO
Application Number:
JP2007058937A
Publication Date:
September 25, 2008
Filing Date:
March 08, 2007
Export Citation:
Assignee:
IBIDEN CO LTD
International Classes:
C04B35/52; C01B31/04; C30B15/10; C30B29/06; H01L21/205; H01L21/3065; H01L21/683
Domestic Patent References:
| JPS5678835U | 1981-06-26 | |||
| JP2003183076A | 2003-07-03 | |||
| JPH02199012A | 1990-08-07 | |||
| JPS5678835U | 1981-06-26 |
Attorney, Agent or Firm:
Shohei Oguri
Hironori Honda
Toshimitsu Ichikawa
Hironori Honda
Toshimitsu Ichikawa