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Patent Searching and Data


Title:
CARBON FIBER DEVICE, AND MANUFACTURING METHOD OF CARBON FIBER DEVICE
Document Type and Number:
Japanese Patent JP2009140723
Kind Code:
A
Abstract:

To provide a carbon fiber device capable of forming a metal catalyst layer in nearly the whole region of the bottom face of a hole of a hole forming layer, and to provide a manufacturing method of the carbon fiber device.

The FED (carbon fiber device) 1 is equipped with a cathode substrate 2, a cathode electrode 3 formed on the cathode substrate 2, the metal catalyst layer 4 formed on the cathode electrode 3, a hole forming layer 6 which covers one part of the metal catalyst layer 4, in which the hole 17 to expose the metal catalyst layer 4 is formed, and which includes an insulating layer 16, and a carbon fiber 5 extending from the metal catalyst layer 4 exposed from the hole forming layer 6. In the manufacturing method of the FED 1, after forming the metal catalyst layer 4, the hole forming layer 6 is formed.


Inventors:
Kamiyama, Daisuke
Application Number:
JP2007000315352
Publication Date:
June 25, 2009
Filing Date:
December 06, 2007
Export Citation:
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Assignee:
ROHM CO LTD
International Classes:
H01J1/304; H01J9/02; H01J31/12; H01J1/30; H01J9/02; H01J31/12