PURPOSE: To provide a carbon fluoride composition having heat resistance, chemical resistance and moisture resistance characteristics better than those of the conventional fluorocarbon materials and more particularly improved moisture resistance characteristics.

CONSTITUTION: The vapors consisting of a compd. contg. fluorine and carbon, such as tetrfluoroethylene or hexafluorobenzene, are excited and are decomposed to fragments which are condensed on a base material to form the solid of the fluorocarbon. A fluorocarbon solid compsn. of a low ratio of fluorine to carbon is thus formed by a chemical vapor deposition process. These vapors may be excited by various techniques including a thermal filament method. The solids of the fluorocarbon are useful for iceproofing of aircraft, kitchen utensils, electric appliances, surgical tools, chemical treatments, gaskets, seals, diaphragms, packings, valve seats, windings, release agent components, coating materials for extrusion molding machines, artificial organs for medical treatments and other analogous non-wetting applications.