To provide a carbon target which is produced with high productivity and lessens an abnormal electric discharge and particle generation.
The carbon target 2 is composed of carbon of a graphite structure and carbon of an amorphous structure. The carbon 22 of the amorphous structure is packed into the gaps among the carbon particles 21 of the graphite structure and the carbon particles 21 of the graphite structure are bonded to each other by the carbon 22 of the amorphous structure and, therefore, the splashing of the carbon particles 21 of the graphite structure and the formation of particles at the time of sputtering do not arise. Since the adsorption quantity of moisture and oxygen decreases, the abnormal electric discharge decreases. Such carbon target 2 may be composed by immersing the carbon sintered compact of the graphite structure into a soln. in which the raw material of an org. polymer material is dissolved, then baking the same or may be composed by baking a material formed by dispersing the carbon particles of the graphite structure into the soln. in which the raw material of the org. polymer material is dissolved to a slurry form.
MATSUMOTO HIROSHI
OBA AKIRA
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