Title:
CARBOXYLATE, CARBOXYLIC ACID GENERATOR, RESIN, RESIST COMPOSITION, AND METHOD FOR PRODUCING RESIST PATTERN
Document Type and Number:
Japanese Patent JP2023078097
Kind Code:
A
Abstract:
To provide a carboxylate, a resin, and a resist composition which allow a resist pattern having good line edge roughness to be produced.SOLUTION: There are provided a carboxylate represented by formula (I), a carboxylic acid generator containing the carboxylate, a resin derived from the carboxylate, and a resist composition.SELECTED DRAWING: None
Inventors:
SHIMADA MASAHIKO
ICHIKAWA KOJI
ICHIKAWA KOJI
Application Number:
JP2022185599A
Publication Date:
June 06, 2023
Filing Date:
November 21, 2022
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO
International Classes:
C07D333/76; C07C69/54; C07D307/00; C08F12/04; C08F20/12; C09K3/00; G03F7/004; G03F7/039; G03F7/20
Attorney, Agent or Firm:
Patent Attorney Corporation Shinju Global IP