Title:
CARBOXYLATE, CARBOXYLIC ACID GENERATOR, RESIST COMPOSITION, AND METHOD FOR PRODUCING RESIST PATTERN
Document Type and Number:
Japanese Patent JP2020180113
Kind Code:
A
Abstract:
To provide a salt, an acid generator, and a resist composition capable of producing a resist pattern with good line edge roughness.SOLUTION: A carboxylate of formula (I) and a resist composition containing the same are provided. [In the formula, R1a represents H or an acid-labile group; R2 and R3 each represent a halogen atom, a fluorinated alkyl group, an alkyl group or the like; m3 represents an integer of 0-4; m4 represents an integer of 0-5; and X0 represents an optionally substituted hydrocarbon group, provided that -CH2- contained in the hydrocarbon group may be substituted with -O-, -S-, -CO- or -SO2-.]SELECTED DRAWING: None
Inventors:
MASUYAMA TATSURO
NAGATA SHUNJIRO
ICHIKAWA KOJI
NAGATA SHUNJIRO
ICHIKAWA KOJI
Application Number:
JP2020073376A
Publication Date:
November 05, 2020
Filing Date:
April 16, 2020
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO
International Classes:
C07C62/24; C07C39/367; C07C43/225; C07C69/96; C07D317/30; C07D317/72; C07D319/06; C07D319/08; C07D321/10; C07D339/06; C07D339/08; C07D407/12; C09K3/00; G03F7/004; G03F7/039; G03F7/20
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation