Title:
CARRIER CART OF PLATE CARRIER
Document Type and Number:
Japanese Patent JP3407306
Kind Code:
B
Abstract:
PURPOSE: To enable easy transfer of a carrier for a large plate and to easily transfer it to a carrier station by mounting the carrier on a wagon which can travel and by providing a slider part wherein the carrier is movable on the wagon by a fixed amount in two dimensions inside a horizontal plane.
CONSTITUTION: A carrier 8 is mounted on a mount board 22 with the mount board 22 and an intermediate board 24 on a wagon 11 fastened with a lock pin 26. The carrier 8 is transferred between the mount board 22 of the wagon 11 and an elevator part 9. In the process, the mount board 22 is freely moved in XY direction and each of pins 21A to 21D and bottoms 8B1 to 8B4 of a bottom board 8A are surely fitted. Therefore, a carrier and a carrier cart, and a carrier cart and a device body at a transfer destination can be easily positioned without application of unnecessary force during fitting and can be transferred readily without being limited by a size and a weight of the carrier. Furthermore, positioning accuracy can be restrained from deteriorating due to generation of dust and abrasion of a fitting part.
Inventors:
Hanazaki, Tetsutsugu
Application Number:
JP1992000001936
Publication Date:
March 14, 2003
Filing Date:
January 09, 1992
Export Citation:
Assignee:
NIKON CORP
International Classes:
B60P1/00; B60P1/64; B61D47/00; B62B5/00; B65G35/00; B65G47/52; B65G49/06; H01L21/677; H01L21/68; B60P1/00; B60P1/64; B61D47/00; B62B5/00; B65G35/00; B65G47/52; B65G49/05; H01L21/67; (IPC1-7): H01L21/68; B60P1/00; B60P1/64; B61D47/00; B62B5/00; B65G35/00; B65G47/52; B65G49/06
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