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Patent Searching and Data


Title:
CARRIER FOR CONTAINING WAFER
Document Type and Number:
Japanese Patent JP2003068838
Kind Code:
A
Abstract:

To obtain a carrier for containing stacked wafers in which workability is enhanced at the time of taking in and out the wafers while protecting them against damage.

The carrier 1 for containing wafers comprises a section 3 for containing wafers 2, and a cover part 4 for covering the containing section 3. The containing section 3 is provided with a wall part 6 standing from the bottom face 5 to surround wafers 2 stacked in three directions, wherein the opening of the wall part 6 serves as an inlet/outlet 7. The inlet/outlet 7 has a width matching the diameter of the wafer 2 and opens entirely in the stacking direction of the wafers 2. The cover part 4 is provided with a first wall face 10a covering the inlet/outlet 7 entirely when it covers the containing section 3.


Inventors:
TAMARU TAKUMI
Application Number:
JP2001251581A
Publication Date:
March 07, 2003
Filing Date:
August 22, 2001
Export Citation:
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Assignee:
SONY CORP
International Classes:
B65D85/86; B65G49/07; H01L21/673; H01L21/68; (IPC1-7): H01L21/68; B65D85/86; B65G49/07
Domestic Patent References:
JPS6489336A1989-04-03
JPH11145269A1999-05-28
JPS58987U1983-01-06
JP2000106393A2000-04-11
JP2001055274A2001-02-27
Attorney, Agent or Firm:
Kunio Yamaguchi (1 person outside)