Title:
CARRIER FOR EXPOSING DEVICE
Document Type and Number:
Japanese Patent JPS6081824
Kind Code:
A
Abstract:
PURPOSE:To assure high prealignment precision in manual setting avoiding any interference in case of simultaneous application in automatic setting by a method wherein locating members are provided so that they may come into contact with the periphery of a reticle or mask retracting out of carrier channel as necessary. CONSTITUTION:Locating pins 5a-5e as multiple locating members are provided on one side of base so that they may abut against the periphery of at least two sides of a reticle R placed on set positions on prisms. These locating pins are provided so that they may retract out of travelling channel of the reticle R in the carrier part 2 as necessary i.e. to be pushed down by the load of reticle R placed thereon. When the reticle R is misplaced a little bit in X or Y direction, the reticle R is lifted on the head of the pins 5b, 5e or 5a in case a slider 7 falles down. The locating pins 5a-5e fall down with their heads 52 pushing down a spring 53 when they are loaded with the reticle R while the reticle R horizontally placed on the prisms 4a-4d is not disturbed by the locating pins 5a-5e even if they come into contact with the reticle R.
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Inventors:
NARAKI TAKESHI
Application Number:
JP18919883A
Publication Date:
May 09, 1985
Filing Date:
October 12, 1983
Export Citation:
Assignee:
NIPPON KOGAKU KK
International Classes:
G03F7/20; H01L21/027; (IPC1-7): H01L21/30; G03F7/20
Attorney, Agent or Firm:
Masatoshi Sato