Title:
保持リング及びキャリアリングを持つキャリアヘッド
Document Type and Number:
Japanese Patent JP5329071
Kind Code:
B2
Abstract:
A carrier head that has a housing, a base assembly, a retaining ring, a carrier ring, and a flexible membrane is described. The base assembly is vertically movable relative to the housing. The retaining ring is connected to and vertically movable relative to the base assembly and has a lower surface configured to contact a polishing pad and an inner surface configured to circumferentially surround the edge of a substrate to retain the substrate. The carrier ring is connected to and vertically fixed relative to the base assembly, circumferentially surrounds the retaining ring to prevent lateral motion of the retaining ring, and has a bottom surface configured to contact a polishing pad.
Inventors:
Stephen M. Zuniga
Andrew J. Neigengast
Jeon Hoon O
Andrew J. Neigengast
Jeon Hoon O
Application Number:
JP2007303516A
Publication Date:
October 30, 2013
Filing Date:
November 22, 2007
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/304; B24B37/30
Domestic Patent References:
| JP2006324413A | ||||
| JP2004516644A | ||||
| JP11188618A | ||||
| JP2000263401A | ||||
| JP2002516763A | ||||
| JP2000288923A | ||||
| JP2004501779A |
Foreign References:
| WO2006025641A1 | ||||
| WO2006038259A1 |
Attorney, Agent or Firm:
Sonoda Yoshitaka
Kobayashi Yoshinori
Kobayashi Yoshinori
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