Title:
CARRIER PLATE AND DOUBLE SIDE POLISHING MACHINE OF WORKPIECE
Document Type and Number:
Japanese Patent JP2015085418
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a carrier plate which enables polishing slurry to be sufficiently supplied to an upper surface of a workpiece and is used in a double side polishing machine of the workpiece to hold the workpiece, and to provide the double side polishing machine including the carrier plate.SOLUTION: A carrier plate for a double side polishing machine of a workpiece of the invention includes one holding hole for holding the workpiece, and multiple main grooves extending between end parts of the carrier plate which are defined by the holding hole are provided on at least an upper surface of the carrier plate. The double side polishing machine of the workpiece of the invention includes: a rotary surface plate having an upper surface plate and a lower surface plate; a sun gear provided at a center part of the rotary surface plate; an internal gear provided at an outer peripheral part of the rotary surface plate; and the carrier plate provided between the upper surface plate and the lower surface plate.
Inventors:
MIURA TOMONORI
Application Number:
JP2013224414A
Publication Date:
May 07, 2015
Filing Date:
October 29, 2013
Export Citation:
Assignee:
SUMCO CORP
International Classes:
B24B37/28; H01L21/304
Domestic Patent References:
| JPS55165755U | 1980-11-28 | |||
| JPS632664A | 1988-01-07 | |||
| JP2008023617A | 2008-02-07 | |||
| JP2009039828A | 2009-02-26 | |||
| JP2013524484A | 2013-06-17 |
Attorney, Agent or Firm:
Kenji Sugimura
Keisuke Kawahara
Yamaguchi Yusuke
Keisuke Kawahara
Yamaguchi Yusuke