Title:
CARRIER PLATE FOR POLISHING
Document Type and Number:
Japanese Patent JP2004122346
Kind Code:
A
Abstract:
To provide a carrier plate capable of sufficiently restraining impact generated on a polishing object at the time of polishing and easily installing the polishing object.
It is possible to smoothly install the polishing object 3 in a polishing object installing hole 2 by inserting it into a first fan hole 21 from a second fan hole 22, as the polishing object installing hole 2 forms a roughly circular shape made of the first fan hole 21 having a radius the same as a radius of the polishing object 3 and the second fan hole 22 having a radius larger than the radius of the polishing object 3.
Inventors:
KITAHARA KATSUHIRO
ITOI HIKARI
TAKAHASHI MASAAKI
ITOI HIKARI
TAKAHASHI MASAAKI
Application Number:
JP2002294290A
Publication Date:
April 22, 2004
Filing Date:
October 07, 2002
Export Citation:
Assignee:
DAIDEN CO LTD
International Classes:
B24B37/27; B24B37/28; (IPC1-7): B24B37/04
Attorney, Agent or Firm:
Yasuo Hirai