Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
CARRIER FOR PLATY MATERIAL AND METHOD FOR FORMING FILM USING THE SAME
Document Type and Number:
Japanese Patent JPH07126040
Kind Code:
A
Abstract:

PURPOSE: To enhance the coloring uniformity and enable the obtaining of a homogeneous high-grade thin film by protrusively arranging one or more baffle plates in the front and rear end faces in the forward direction of a carrier for a platy unit so as to shift relatively to the vertical directions.

CONSTITUTION: This carrier for a platy unit is provided by using each carrier 3 having at least one or more protrusively arranged baffle plates 12 and 13 in both the front and rear end faces in the forward direction of the carrier 3 for the platy unit so as to shift installing positions thereof in both the front and rear end faces in the vertical directions, keeping a gap 11 between the front and rear carriers 3 and 3 in the forward direction, protrusively arranging the carriers 3 and 3 so as to separate installing positions thereof in the front and rear end faces in the forward direction so that at least one of the baffle plates 12 and 13 may face to the top surface and undersurface of the carrier 3 in the front and rear end faces and superpose in at least the forward direction, conveying the carriers into a sputtering vacuum film-forming apparatus and forming a film.


Inventors:
ONISHI MASAJI
UENO YASUSHI
YAMANAKA SHIGEYUKI
Application Number:
JP26886093A
Publication Date:
May 16, 1995
Filing Date:
October 27, 1993
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
CENTRAL GLASS CO LTD
International Classes:
B60J1/00; B01J3/02; C03C17/245; C23C14/34; C23C14/56; (IPC1-7): C03C17/245; B01J3/02; B60J1/00; C23C14/34; C23C14/56
Attorney, Agent or Firm:
Eiichi Sakamoto