To provide the carrier system of a body to be treated and a carrier method which improve the efficiency of a conveyance between an automatic conveyor and a treatment facility and being capable of shortening the TAT of the body to be treated.
The carrier system of the body to be treated has a plurality of probers 2 and an RGV 3 automatically carrying wafers W for delivering the wafers W one by one, in response to each requirement among these probers 2. The probers 2 and the RGV 3 have an adapter 23 and an arm mechanism 34 mutually delivering the wafers W one by one continuously and a group controller 5, and an RGV controller 4 controlling these both adapter and arm mechanism, respectively. The probers 2 and the RGV 3 further have PIO communication interfaces 11A and 11B which transmit and receive the control signals for the controllers 4 and 5 as optical signals.
| JPH08166806 | PROGRAMMABLE CONTROLLER |
| WO/1999/040491 | METHOD FOR ACTIVATING THE FUNCTIONS OF AN ELECTRICAL APPARATUS |
SHIMIZU SHINYA
ISHIHARA KAORI
| JP2002217263A | 2002-08-02 | |||
| JPH07315565A | 1995-12-05 | |||
| JPH0778858A | 1995-03-20 |
Next Patent: OPTICAL ILLUMINATION SYSTEM AND ALIGNER