Title:
CARRIER SYSTEM
Document Type and Number:
Japanese Patent JP2005067899
Kind Code:
A
Abstract:
To increase a carrying speed by carrying a carried member without allowing the carried member to come into contact with a carrier system.
This carrier system comprises a support member and a plurality of air nozzles installed on the support plate. Air is sprayed or sucked so that the carried member can be carried in the state of non-contact with the carrier system. Thus, since a friction is not produced between the carrier system and the carried member, the carrying speed can be increased.
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Inventors:
AN GEUN-SOO
YOON GI-CHEON
YOON GI-CHEON
Application Number:
JP2004242430A
Publication Date:
March 17, 2005
Filing Date:
August 23, 2004
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO LTD
International Classes:
G02F1/13; B65G49/06; B65G51/03; B65G53/02; F26B15/12; F26B25/00; H01L21/677; (IPC1-7): B65G51/03; B65G49/06; G02F1/13; H01L21/68
Domestic Patent References:
| JPH07172573A | 1995-07-11 | |||
| JPS62130925A | 1987-06-13 | |||
| JPS5538828B2 | 1980-10-07 | |||
| JP2000511354A | 2000-08-29 | |||
| JP2002308425A | 2002-10-23 |
Foreign References:
| US4009785A | 1977-03-01 |
Attorney, Agent or Firm:
Yukio Ono
Tomoko Inazumi
Tomoko Inazumi