CARRIER TRUCK FOR CLEAN ROOM - MITSUBISHI ELECTRIC CORP

Title:

CARRIER TRUCK FOR CLEAN ROOM

Document Type and Number:

Japanese Patent JPS60236864

Kind Code:

A

Abstract:

PURPOSE: To maintain a cleanliness factor inside a clean room, by recovering air jetted out of an air pallet and purifying it.

CONSTITUTION: The air jetted to an air pallet 2 from a compressor 11b is recovered out of a return duct 10 situated around the air pallet 2 and then it is made so as not to be discharge to a clean room. In addition, the recovered air is purified in a duct collector 11d via a filter 11c, and the air is made so as to be rejetted with it reused.

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Inventors:

ASANA YOSHIHISA
NISHIDA NAOKI
ISHIMORI TOSHITSUGU

Application Number:

JP9098284A

Publication Date:

November 25, 1985

Filing Date:

May 09, 1984

Export Citation:

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Assignee:

MITSUBISHI ELECTRIC CORP

International Classes:

B61D27/00; B60V1/00; B60V3/02; B61B13/00; (IPC1-7): B60V1/00; B61B13/00

Attorney, Agent or Firm:

Hiroaki Tazawa

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