Title:
CARRYER DEVICE FOR TRANSFER OF WORK CARRIER
Document Type and Number:
Japanese Patent JPH04288829
Kind Code:
A
Abstract:
PURPOSE: To provide a carrying device that can quickly transfer a work carrier, having satisfied purely spatial conditions, can use a plastic that has an extremely high wear resistance and are not attacked chemically for the region of the work carrier. CONSTITUTION: At least one rotary arm 33 is a slider 12 in a vertical direction that can run in the vertical direction by a drive motor 15 in the vertical direction and is supported so that it can be rotated around a horizontal rotary axis line 23. A rotary range 52 of the rotary arm 33 is located at the lower part of the rotary axis line 23.
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Inventors:
HANSU SHIYUNIIDAA
Application Number:
JP27782191A
Publication Date:
October 13, 1992
Filing Date:
October 24, 1991
Export Citation:
Assignee:
DETSUKAA KG GEB
International Classes:
B23Q41/02; B65G49/04; C23G3/00; H01L21/00; H01L21/304; H01L21/677; H01L21/68; B08B3/04; (IPC1-7): B08B3/04; B23Q41/02; B65G49/04; C23G3/00; H01L21/304; H01L21/68
Attorney, Agent or Firm:
Takehisa Ito