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Patent Searching and Data


Title:
CARRYING DEVICE AND CARRYING METHOD OF SEMICONDUCTOR WAFER
Document Type and Number:
Japanese Patent JP2003077979
Kind Code:
A
Abstract:

To provide a carrying device capable of preventing lowering of quality of bodies to be carried.

The carrying device 100 is provided with carrying belts 11 and 12 and rolling bodies 21 and 22 provided rotatably on the surfaces of the carrying belts 11 and 12. A plurality of the rolling bodies 21 and 22 are provided along a carrying direction. The carrying device 100 is provided with holders 23 and 24 provided on the surfaces of the carrying belts 11 and 12 and rotatably holding the rolling bodies 21 and 22. The rolling bodies 21 and 22 are ball shapes.


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Inventors:
YAMASHITA TOSHIHIRO
YONEMURA TOSHIO
NOGUCHI TOSHIHIKO
Application Number:
JP2001270157A
Publication Date:
March 14, 2003
Filing Date:
September 06, 2001
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
B65G23/26; B65G49/07; H01L21/677; H01L21/68; B65G15/42; (IPC1-7): H01L21/68; B65G15/42; B65G23/26; B65G49/07
Attorney, Agent or Firm:
Hisami Fukami (4 outside)