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Patent Searching and Data


Title:
CARRYING-IN DEVICE
Document Type and Number:
Japanese Patent JP2012028551
Kind Code:
A
Abstract:

To provide a carrying-in device capable of carrying workpieces such as semiconductor wafers to holding means by using a simpler and lower-cost structure compared to the conventional structure.

A work unit supporting member 110 for annularly arranging and holding a plurality of work units 7 is attachably/detachably supported by a supporting part 124 of a rotating support means 122 provided on a supporting base 120. The work unit supporting member 110 is rotated by a rotating part 123 so that the work units 7 are sequentially positioned at a carry-in position immediately above holding means 32 of a cutting device 10. An annular frame 5 of the work unit 7 positioned at the carry-in position is held by an insertion finger part 135 of carrying means 130 which has been lowered, while at the same time being separated from a holding part 116 of the work unit supporting member 110. In this way, the annular frame 5 is placed on and supported by the holding means 32.


Inventors:
FUKUOKA TAKEOMI
Application Number:
JP2010165680A
Publication Date:
February 09, 2012
Filing Date:
July 23, 2010
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/677; B24B41/06; H01L21/301; H01L21/304
Attorney, Agent or Firm:
Suenari Mikio