Title:
CARRYING JIG FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS61287581
Kind Code:
A
Inventors:
HIRABAYASHI KAZUO
Application Number:
JP12290685A
Publication Date:
December 17, 1986
Filing Date:
June 04, 1985
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L21/673; B65D85/38; B65D85/86; H01L21/67; H01L21/68; (IPC1-7): B65D85/38; H01L21/68
Attorney, Agent or Firm:
Masuo Oiwa