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Title:
CASSETTE STATION
Document Type and Number:
Japanese Patent JP09129706
Kind Code:
A
Abstract:

To stably deliver and receive cassettes by setting an inclined angle of the elevating/lowering means of a cassette holding section so that the cassette holding section can be positioned to a first area when the elevating/lowering means is at the lowest position and to a second area when the elevating/ lowering means is at the highest position.

An elevator 13 is installed in a state where the elevator 13 is inclined to the right from the vertical line at an angle of about 30°. When a holding table 12 is raised, therefore, cassettes 14-1 and 14-2 are fed to an area A through the window of a partition plate 11. When the table 12 is lowered, on the other hand, the cassettes 14-1 and 14-2 are fed to another area B through the window of the plate 11. The sensors 19a-1, 19a-2, 19b-1, and 19b-2 of the table 12 detect the presence/absence of glass masks in cassettes. Limit switches 20-1 and 20-2 are provided to the main body of a cassette station 1. The switch 20-1 detects that the table 12 is completely raised and the switch 20-2 detects that the table 12 is completely lowered.


Inventors:
Ukigusa, Hiroshi
Morita, Masaru
Application Number:
JP1995000286298
Publication Date:
May 16, 1997
Filing Date:
November 02, 1995
Export Citation:
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Assignee:
ISHIKAWAJIMA HARIMA HEAVY IND CO LTD
ISHIKAWAJIMA SYST TECHNOL KK
International Classes:
G01B17/00; B65G1/00; H01L21/027; H01L21/677; H01L21/68; G01B17/00; B65G1/00; H01L21/02; H01L21/67; (IPC1-7): H01L21/68; B65G1/00; G01B17/00; H01L21/027



 
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