Title:
CASSETTE, THIN FILM DEPOSITION SYSTEM, AND THIN FILM DEPOSITION METHOD
Document Type and Number:
Japanese Patent JP2004084012
Kind Code:
A
Abstract:
To obtain deposited products which have few defects, are excellently mass-produced at low cost.
A cassette 23 for photoreceptors is formed by erecting cylindrical substrates 26, on which films are deposited, between a plurality of respective flat heating elements 27 of the substrates 26 on a body arrayed and formed with these elements 27 within a cylindrical hermetic vessel formed with gas passage apertures and by depositing a-Si-based layers by a hot wire CVD (Chemical Vapor Deposition) process on the respective substrates 26.
Inventors:
KAWAKAMI TETSUYA
HAYASHI HIROSHI
HAYASHI HIROSHI
Application Number:
JP2002247390A
Publication Date:
March 18, 2004
Filing Date:
August 27, 2002
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
C23C16/44; C23C16/458; (IPC1-7): C23C16/44; C23C16/458