【発明の名称】試料の後処理方法

Title:

【発明の名称】試料の後処理方法

Document Type and Number:

Japanese Patent JP3104840

Kind Code:

B2

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Inventors:

Ryoji Fukuyama
Makoto Nawata
Yutaka Kakehi
Hironobu Kawahara

Application Number:

JP1230695A

Publication Date:

October 30, 2000

Filing Date:

January 30, 1995

Export Citation:

Assignee:

株式会社日立製作所

International Classes:

H01L21/302; H01L21/3065; H01L21/3213; (IPC1-7): H01L21/3065; H01L21/3213

Domestic Patent References:

Attorney, Agent or Firm:

Kenjiro Take

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