Title:
カタディオプトリック光学系、照明光学系、露光装置および物品製造方法
Document Type and Number:
Japanese Patent JP7029564
Kind Code:
B2
Abstract:
To provide a small size catadioptric optical system having a configuration advantageous for reducing aberrations.SOLUTION: The catadioptric optical system is telecentric on the object surface and the image surface, which includes: a first reflection plane; a second reflection plane; a third reflection plane; a fourth reflection plane; and a refractive surface which has a positive power being disposed between the object surface and the first reflection plane. A ray of light output from the object surface goes through the refractive surface, the first reflection plane, the refractive surface, the second reflection plane, the refractive surface, the third reflection plane, and the fourth reflection plane in order and reaches the image surface.SELECTED DRAWING: Figure 4A
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Inventors:
Osaka Noboru
Application Number:
JP2021075357A
Publication Date:
March 03, 2022
Filing Date:
April 27, 2021
Export Citation:
Assignee:
Canon Inc
International Classes:
G02B17/08; G03F7/20
Domestic Patent References:
| JP61203419A | ||||
| JP2009025737A | ||||
| JP2010020017A |
Attorney, Agent or Firm:
Patent Business Corporation Otsuka International Patent Office