Title:
CATHODE CARTRIDGE OF ELECTROPLATING TESTING APPARATUS, AND ELECTROPLATING TESTING APPARATUS
Document Type and Number:
Japanese Patent JP3730836
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a cathode cartridge of an electroplating testing apparatus capable of forming a uniform plating film.
SOLUTION: This cathode cartridge to be used in the electroplating testing apparatus comprises a plate-like cathode conductor 4 which is opened in a shape of a plating surface 2a of a work 2 to be plated which is a cathode plate, has a plurality of projections 4 abutted on a circumferential edge of the plating surface 2a, and is exposed connectable to a DC power source at a portion not immersed in electrolyte, a rear side plate-like insulator 5 which covers a rear side of the work 2 and the rear side of the cathode conductor 4 and has a groove with the work 2 and the cathode conductor 4 fitted therein, a front side insulator 6 which is opened in a shape of the plating surface 2a and covers the front side of the cathode conductor 4, and an elastic thin plate 3 which is held between the work 2 and the rear side insulator 5, and possibly further comprises a dummy plate 5 forming a cathode provided on the outer side of the front side insulator 6.
Inventors:
Wataru Yamamoto
Application Number:
JP2000152342A
Publication Date:
January 05, 2006
Filing Date:
May 24, 2000
Export Citation:
Assignee:
Yamamoto Plating Tester Co., Ltd.
International Classes:
C25D21/12; C25D7/12; C25D17/06; C25D17/08; C25D17/10; C25D17/12; C25D21/10; H01L21/288; (IPC1-7): C25D21/12; C25D7/12; C25D17/06; C25D17/08; C25D17/10; C25D21/10; H01L21/288
Domestic Patent References:
| JP11200096A | ||||
| JP11140694A | ||||
| JP10233400A | ||||
| JP8311689A | ||||
| JP8074096A | ||||
| JP7188975A | ||||
| JP6310461A |
Attorney, Agent or Firm:
Isono Dozo
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