Title:
陰極構成体、電子銃、及びこのような電子銃を有するリソグラフィシステム
Document Type and Number:
Japanese Patent JP6929910
Kind Code:
B2
Abstract:
The invention relates to a cathode arrangement comprising: a thermionic cathode comprising an emission portion provided with an emission surface for emitting electrons, and a reservoir for holding a material, wherein the material, when heated, releases work function lowering particles that diffuse towards the emission portion and emanate at the emission surface at a first evaporation rate; a focusing electrode comprising a focusing surface for focusing the electrons emitted from the emission surface of the cathode; and an adjustable heat source configured for keeping the focusing surface at a temperature at which accumulation of work function lowering particles on the focusing surface is prevented.
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Inventors:
Dinu-Ghourtrel, Laura
Hogar Borst, Eric Petrus
Hogar Borst, Eric Petrus
Application Number:
JP2019168023A
Publication Date:
September 01, 2021
Filing Date:
September 17, 2019
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01J1/20; G03F7/20; H01J1/146; H01J3/02; H01J37/06; H01J37/305; H01L21/027
Domestic Patent References:
| JP10255679A | ||||
| JP2011040398A | ||||
| JP8255558A | ||||
| JP2003346671A | ||||
| JP48018024B1 | ||||
| JP2006221983A |
Foreign References:
| US5623183 | ||||
| WO2010070837A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito