Title:
CATHODE LUMINESCENCE SPECIMEN HOLDER AND CATHODE LUMINESCENCE SPECTROSCOPIC ANALYZER
Document Type and Number:
Japanese Patent JP3718818
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a cathode luminescence specimen holder to easily perform cathode luminescence analysis by using an existing transmission electron microscope (TEM) and a spectroscopic analyzer using the cathode luminescence specimen holder.
SOLUTION: This cathode luminescence spectroscopic analyzer 100 is equipped with the transmission electron microscope 101 to observe a transmitting beam TB by irradiating an electron beam EB in a vacuum chamber 10, the cathode luminescence specimen holder 102 mountable to the transmission electron microscope 101, a spectrometer 103 to measure light CL guided by the cathode luminescence specimen holder 102 by separating it, and a computer 104 to display the result of measurement based on the measured value of the spectrometer 103.
Inventors:
Tetsuro Tanabe
Shunsuke Muto
Toshihiko Nagamura
Shunsuke Muto
Toshihiko Nagamura
Application Number:
JP2001334389A
Publication Date:
November 24, 2005
Filing Date:
October 31, 2001
Export Citation:
Assignee:
Unisoku Co., Ltd.
International Classes:
H01J37/20; H01J37/252; G01N21/62; (IPC1-7): G01N21/62; H01J37/20; H01J37/252
Domestic Patent References:
| JP11096956A | ||||
| JP6168693A | ||||
| JP8298093A | ||||
| JP2001084951A | ||||
| JP10064473A | ||||
| JP6283128A | ||||
| JP62047536A | ||||
| JP5133897A | ||||
| JP60061650A |
Attorney, Agent or Firm:
Mitsuhiko Watanabe