Title:
CATHODE MEMBER, CATHODE, HIGH-SPEED ATOM BEAM SOURCE, AND, MANUFACTURING METHOD OF BONDED SUBSTRATE
Document Type and Number:
Japanese Patent JP2023169957
Kind Code:
A
Abstract:
To provide a cathode member, a cathode, a high-speed atom beam source, and a manufacturing method of a bonded substrate, each enabling suppression of emission of a large-sized foreign matter from the high-speed atom beam source.SOLUTION: A tabular cathode member constituting a cathode of a high-speed atom beam source is provided, comprising a plane which constitutes a cathode-inner surface having contour constituted of four corners and four sides connecting the corners. The tabular cathode member comprises in the plane: a first region which includes the corners and the sides and in which a re-deposition amount of sputter dust generated by spluttering is more than a removal amount of the cathode member by the sputtering generated by using the high-speed atom beam source; and a second region excluding the first region from the plane. The first region has an average value of surface roughness Ra larger than that in the second region.SELECTED DRAWING: Figure 6
Inventors:
HATTA NAOKI
NISHIMURA EIICHIRO
OKADA JIRO
SAKATA TOYOKAZU
NISHIMURA EIICHIRO
OKADA JIRO
SAKATA TOYOKAZU
Application Number:
JP2022081320A
Publication Date:
December 01, 2023
Filing Date:
May 18, 2022
Export Citation:
Assignee:
SICOXS CORP
International Classes:
H01L21/02; H05H3/02
Attorney, Agent or Firm:
Fumio Takino
Toshiaki Tsuda
Yasuhiro Fukuda
Atsushi Watanabe
Toshiaki Tsuda
Yasuhiro Fukuda
Atsushi Watanabe