Title:
CEILING TRAVELING VEHICLE SYSTEM
Document Type and Number:
Japanese Patent JP2006051886
Kind Code:
A
Abstract:
To provide a ceiling traveling vehicle system capable of directly carrying articles between processing devices in different processes via an inter-process carrying path, shortening carrying time, and eliminating the need for a stocker between an in-process carrying path and an inter-process carrying path.
Articles are carried from a load port 26a to a load port 26b of the processing device 16. A ceiling buffer 28 is provided corresponding to each load port 26. The ceiling traveling vehicle 14 can freely delivery articles to/from the load port 26 and the ceiling buffer 28.
Inventors:
Hoshino, Kenji
Application Number:
JP2004000235192
Publication Date:
February 23, 2006
Filing Date:
August 12, 2004
Export Citation:
Assignee:
MURATA MACH LTD
International Classes:
B61B3/02; B61D27/00; B65G35/00; B65G49/07; H01L21/677