Title:
セル駆動型圧電/電歪アクチュエータ及びその製造方法
Document Type and Number:
Japanese Patent JP4842520
Kind Code:
B2
Abstract:
The actuator (1) has a cell (3) defined by two side walls, a substrate and a ceiling wall. Piezoelectric/electrostrictive devices change a volume of the cell causing displacement in walls of the cell. The devices have a set of layered piezoelectric/electrostrictive bodies and electrode layers which are alternately stacked. End portions of the electrodes are embedded in the bodies at an internal side of the cell. Independent claims are also included for the following: (a) an optical switch (b) a micro pump (c) a method of manufacturing a cell driving type piezoelectric/electrostrictive actuator.
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Inventors:
Yukihisa Takeuchi
Koji Kimura
Koichi Iwata
Koji Kimura
Koichi Iwata
Application Number:
JP2004154950A
Publication Date:
December 21, 2011
Filing Date:
May 25, 2004
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
B41J2/16; H01L41/083; B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/145; F04B9/00; F04B17/00; F04B43/04; G02B6/35; H01L27/20; H01L41/09; H01L41/187; H01L41/22; H01L41/273; H01L41/339; H02N2/00
Domestic Patent References:
| JP10109411A | ||||
| JP2003075746A | ||||
| JP2003072061A | ||||
| JP10202863A |
Attorney, Agent or Firm:
Ippei Watanabe