Title:
CENTER MANAGEMENT DEVICE OF LIQUID CHEMICAL TREATING DEVICE
Document Type and Number:
Japanese Patent JPH08306654
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To efficiently manage plural chemical stations by connecting the chemical stations with a main computer, for operating the central management of data from plural sensors for sensing a chemicals tank, filter, pump, and their process variables as a whole. SOLUTION: Sensors provided in a chemical station 10 are provided, so that main process variables of deciding the reliability of a cleaning process can be sensed. Those main process variables may be the number of particles in a chemicals tank, the temperature and concentration of chemicals, the differential pressure of a filter, the number of strokes, the flowing speed of the chemicals, and the pressure of a pump or the like. The plural sensors are provided in the chemical station 10 so that the main process variables can be measured. Then, the plural chemical stations provided in a mass-production line of semiconductor devices and liquid crystal devices are connected to a main computer 20. Data for the main process variables are transmitted to the main computer and the central management of the data is conducted.
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Inventors:
BOKU KOUSHIYUU
SAI KIZEN
SAI KIZEN
Application Number:
JP19225595A
Publication Date:
November 22, 1996
Filing Date:
July 27, 1995
Export Citation:
Assignee:
SAMSUNG ELECTRONIC
International Classes:
B01J4/02; G05B15/02; G05B23/02; H01L21/00; H01L21/02; H01L21/304; H01L21/306; (IPC1-7): H01L21/304; B01J4/02; G05B15/02; G05B23/02; H01L21/02; H01L21/306
Attorney, Agent or Firm:
Mikio Hatta