To provide a centrifugal differential pressure generating device that can generate micro differential pressure with high accuracy by reducing the influence of temperature.
In a centrifugal differential pressure generating device for generating differential pressure of gas by the rotation of a rotor 11 provided with a passage from the rotational center side to the peripheral edge part side, a case 15 for enclosing the rotor 11 is submerged in a constant temperature liquid bath, or a low pressure side pressure takeoff port and a high pressure side pressure takeoff port are connected to a buffer tank 3, or the buffer tank 3 is submerged in a constant temperature liquid bath 42, or at least a part of piping is provided with a solenoid valve, or a pressure gauge, a temperature gauge, a hygrometer and an arithmetic unit 5 are provided, and the measured value are inputted to the arithmetic unit 5 to correct density of gas.
UEKI MASAAKI
KAHANE TSUNEMICHI
KATOU KOUHEI
TSUKASA SOKKEN KK
Kawai Haruo