Title:
CENTRIFUGAL DRYING DEVICE
Document Type and Number:
Japanese Patent JP3476950
Kind Code:
B2
Abstract:
PURPOSE: To provide an easy and less-expensive centrifugal drying device capable of performing an effective preventing of electrical charging in a semiconductor wafer and the like.
CONSTITUTION: There are provided a turn table 1 rotated by an electrical motor; a metallic cradle 2 rotatably held at a periphery of the turn table 1 through a shaft 10 and a bearing 11; and an electrical conductive passage metallic leaf spring 14 or the like formed between the cradle 2 and the ground point.
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Inventors:
Hiroaki Murao
Shigehisa Sato
Shigehisa Sato
Application Number:
JP4135795A
Publication Date:
December 10, 2003
Filing Date:
February 06, 1995
Export Citation:
Assignee:
Kaijo Co., Ltd.
International Classes:
F26B5/08; F26B11/08; F26B11/18; (IPC1-7): F26B11/18; F26B5/08
Domestic Patent References:
| JP228926A | ||||
| JP4242269A | ||||
| JP61199041U | ||||
| JP63115215U |
Attorney, Agent or Firm:
Toshihiko Sakurai