Title:
CENTRIFUGAL DRYING EQUIPMENT
Document Type and Number:
Japanese Patent JP3204284
Kind Code:
B2
Abstract:
PURPOSE: To provide a centrifugal drying equipment in which the drying time is shortened and the electrostatic influence onto a substrate is suppressed while reducing the size sufficiently even for a substrate having large diameter.
CONSTITUTION: The centrifugal drying equipment comprises a member 45 for bearing a substrate holding cassette 20 on the acting side of centrifugal force thus reinforcing the cassette 20, and means 48 for preventing the substrate from falling off from the cassette 20. This structure realizes reduction in size of the substrate holding cassette 20.
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Inventors:
Toshiaki Yamamoto
Application Number:
JP30727093A
Publication Date:
September 04, 2001
Filing Date:
November 13, 1993
Export Citation:
Assignee:
Kaijo Co., Ltd.
International Classes:
F26B5/08; F26B11/08; H01L21/304; (IPC1-7): H01L21/304; F26B5/08; F26B11/08
Domestic Patent References:
| JP52131255A | ||||
| JP6177109A | ||||
| JP456452B2 |
Attorney, Agent or Firm:
Masaharu Hagiri
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