Title:
CERAMIC BASE PLATE AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP3697277
Kind Code:
B2
Abstract:
PURPOSE: To obtain a ceramic base plate little in the generation of defects such as bad appearance and adhesion failure due to the bleedout or deposition of a liquid phase, and capable of partially changing the characteristics of the base plate in the same base plate.
CONSTITUTION: The nitride ceramic base plate containing a sintering auxiliary has a part different in thermal conductivity in the flat surface direction of the ceramic base plate. The ceramic base plate is obtained by sintering the nitride ceramic base plate containing a sintering auxiliary in a non-oxidizing atmosphere in a state wherein the powder of a metal oxide is loaded on at least a part of the surface of the nitride ceramic base plate.
Inventors:
Hiroki Asai
Application Number:
JP28407194A
Publication Date:
September 21, 2005
Filing Date:
October 25, 1994
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
C04B35/58; C04B35/581; C04B35/64; C04B41/87; C04B41/88; C04B41/90; H01L23/14; H01L23/15; H05K1/03; (IPC1-7): C04B41/87; C04B41/88; C04B41/90; H01L23/15; H05K1/03
Domestic Patent References:
| JP2157164A | ||||
| JP7033531A |
Attorney, Agent or Firm:
Hisashi Hatano
Shunguchi Sekiguchi
Shunguchi Sekiguchi
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