PURPOSE: To produce a ceramic coated member having superior wear resistance and not scraping an opposite material by forming an amorphous silicon nitride layer contg. halogen on each metallic support.

CONSTITUTION: Cast metallic supports 15 are arranged in a vacuum chamber 12 and heated to about 200W300°C. After the chamber 12 is evacuated to about 10-3W10-4Torr with an exhaust system 14, a gaseous starting material consisting of silane, ammonia and fluorine is introduced into the chamber 12 from the inlet 18 and spouted toward the supports 15 through the spouting holes 20 in a baffle plate 19 and the spouting holes 21 in an electrode 16. The pressure of the gas in the chamber 12 is regulated to about 0.1W10Torr and high frequency power is applied between the electrode 16 and the supports 15 to cause electric discharge. Each of the supports 15 is coated with an a-SiN layer contg. fluorine atoms to about 2μm thickness.