Title:
光変換用セラミック複合体及びその製造方法
Document Type and Number:
Japanese Patent JP5370595
Kind Code:
B2
Abstract:
Disclosed are a ceramic composite for light conversion with a flat surface obtained even in a solidified body in which the plurality of crystalline phases of oxides is continuously and three-dimensionally entangled with each other and a method for manufacture thereof. A manufacture method of a ceramic composite for light conversion is characterized in that a polishing step is provided in a CMP process applied for the surface of a solidified body with a structure in which an Al 2 O 3 phase and a crystalline phase of oxides other than Al 2 O 3 are continuously and three-dimensionally entangled with each other, and pH of a polishing liquid is adjusted between 11 and 12 when performing the CMP process. A ceramic composite for light conversion includes a solidified body with a structure, in which an Al 2 O 3 phase and a crystalline phase of oxides other than Al 2 O 3 are continuously and three-dimensionally entangled with each other and the step level difference between Al 2 O 3 phase and a crystalline phase of oxides other than Al 2 O 3 on the surface of the solidified body is equal to 0.010 µm or less.
Inventors:
Inamori Futata
Takashi Kono
Toshio Doi
Shuhei Kurokawa
Takashi Kono
Toshio Doi
Shuhei Kurokawa
Application Number:
JP2012547826A
Publication Date:
December 18, 2013
Filing Date:
December 02, 2011
Export Citation:
Assignee:
Ube Industries,Ltd.
International Classes:
B24B37/00; C09K3/14; C09K11/08; C09K11/80; H01L21/304
Domestic Patent References:
| JP2004335722A | 2004-11-25 |
Foreign References:
| WO2007148829A1 | 2007-12-27 |
Attorney, Agent or Firm:
Masaru Itami
Aimi Tajima
Aimi Tajima