Title:
CERAMIC DISC AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2002233974
Kind Code:
A
Abstract:
To form a discrimination display part on a black ceramic disc of silicon carbide ceramics, etc.
The discrimination display part 7 is formed by filling white ceramics or white fluorocarbon resin in a discrimination display groove engraved on a surface of the ceramic disc 1 made of black ceramics. Thereby, productivity in wafer polishing is enhanced and highly precise polishing of a wafer and quality control of a jig and the wafer are capable in the ceramic disc using silicon carbide ceramics.
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Inventors:
IGARASHI HIROBUMI
Application Number:
JP2001024807A
Publication Date:
August 20, 2002
Filing Date:
January 31, 2001
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
B25H7/02; B24B37/12; B24B37/14; C04B41/82; C04B41/87; C04B41/91; H01L21/304; (IPC1-7): B25H7/02; B24B37/04; C04B41/82; C04B41/87; C04B41/91; H01L21/304
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