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Title:
CERAMIC ELEMENT, MANUFACTURE OF CERAMIC ELEMENT, DISPLAY DEVICE, RELAY DEVICE AND CAPACITOR
Document Type and Number:
Japanese Patent JPH11339561
Kind Code:
A
Abstract:

To maintain displacement equal to that at the time of driving voltage application in a no-voltage load condition after the termination of the driving voltage application by analogically changing mechanical displacement depending on an applied voltage.

This ceramic element is composed by providing an actuator part body 26 having an antiferroelectric film 22 and a pair of electrodes 24a, 24b formed on one main plane (surface) of the antiferroelectric film 22, a vibration part 18 to support the actuator part body 26, and a fixed part 20 to support the vibration part 18 in a manner to make it vibrate, and is so structured additionally that the antiferroelectric film 22 after polarization has a region Zt of which average dielectric constant analogically increases depending on a voltage V applied to the pair of electrodes 24a, 24b. To be concrete, when it is assumed that the average film thickness of the antiferroelectric film 22 is (t) and the pitch between the pair of electrodes 24a, 24b is (p), the element is so structured as to satisfy a relationship of p/t≤2.5.


Inventors:
Takeuchi, Yukihisa
Kashiwaya, Toshikatsu
Takahashi, Nobuo
Application Number:
JP1998000146170
Publication Date:
December 10, 1999
Filing Date:
May 27, 1998
Export Citation:
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Assignee:
NGK INSULATORS LTD
International Classes:
G02B7/00; C04B35/49; C04B35/491; C04B35/64; H01B3/12; H01L41/09; H01L41/187; H01L41/22; H01L41/29; H01L41/333; H01L41/339; H01L41/43; H01H57/00; (IPC1-7): H01B3/12; C04B35/49; C04B35/64; G02B7/00; H01L41/09; H01L41/187; H01L41/22
Attorney, Agent or Firm:
千葉 剛宏 (外1名)