To prevent the generation of a reaction layer such as tungsten silicide with a heating body or a lead due to a high melting-point metal and maintain resistance stability in constituting a ceramic heater embedded the high melting- point metal with a sintered body.
A ceramic heater 10 is formed by using a high melting-point metal of 2,000°C or more in melting point as a heating body 1 or leads 12 and 13 and embedding it in a sintered body 14 made of an insulation ceramic of silicon nitride or silicon carbonate. In the insulation ceramic of silicon nitride or silicon carbonate, at least one kind of IIIA, IVA, and VA families in an element periodic table is contained at a rate of 0.01vol.% to 10vol.% and sintered at a temperature higher than 1,750°C, and thereby the reaction layer in the high melting-point metal of 20 micrometers in thickness is formed.
SAKURAI CHIHIRO