Title:
CERAMIC HEATING DEVICE
Document Type and Number:
Japanese Patent JP3299118
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To solve a problem causing breakage of alumina, beryllia, sapphire, etc., used as a microwave-guiding window in a heating device using a microwave when the interior of a reactor is highly pressurized.
SOLUTION: This ceramic heating device using a microwave heats a ceramic compact 12 by irradiating microwave from the microwave radiation device 6 through a microwave-guiding tube 5 and microwave-guiding window 4 under ≤1.5 atmospheric pressure. In this case, the microwave-guiding window 4 is constituted of a silica nitride sintered compact having ≤5×10-4 dielectric loss in 10GHz measuring frequency and ≥500°C critical temperature of thermal shock resistance. Breakage or occurrence of crack in the microwave-guiding window 4 when heated with microwave under high pressure is prevented thereby.
Inventors:
Kenichi Tajima
Tasaburo Saji
Tasaburo Saji
Application Number:
JP18193196A
Publication Date:
July 08, 2002
Filing Date:
July 11, 1996
Export Citation:
Assignee:
Kyocera Corporation
Fuji Electric Industry Co., Ltd.
Fuji Electric Industry Co., Ltd.
International Classes:
C04B35/64; F27D11/06; (IPC1-7): C04B35/64; F27D11/06
Domestic Patent References:
| JP6369765A | ||||
| JP492870A | ||||
| JP687663A | ||||
| JP5925937B1 |
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