Title:
CERAMIC JOINED BODY
Document Type and Number:
Japanese Patent JP2005026585
Kind Code:
A
Abstract:
To provide a ceramic joined body which can uniformly heat an object to be heated such as a liquid crystal substrate or the like without causing a temperature distribution on a heat surface of a ceramic substrate.
In the ceramic joined body, a protection ceramic body is joined to the bottom of the disc-shaped ceramic substrate provided with a conductor therein. A heat conductivity of the protection ceramic body is 80% or less of the heat conductivity of the ceramic substrate.
Inventors:
ITO YASUTAKA
Application Number:
JP2003192409A
Publication Date:
January 27, 2005
Filing Date:
July 04, 2003
Export Citation:
Assignee:
IBIDEN CO LTD
International Classes:
H05B3/20; C04B37/00; H01L21/02; H01L21/205; H01L21/3065; H01L21/68; H01L21/683; H05B3/06; H05B3/74; H05K1/03; (IPC1-7): H01L21/02; C04B37/00; H01L21/205; H01L21/3065; H01L21/68; H05B3/06; H05B3/20; H05B3/74
Attorney, Agent or Firm:
Yasuo Yasutomi
Kazunobu Shigehira
Kazunobu Shigehira