Title:
セラミックス材料、静電チャック装置
Document Type and Number:
Japanese Patent JP6432649
Kind Code:
B2
Abstract:
Provided is a composite sintered body for an electrostatic chuck, which is not easily broken even if it is exposed to high-power plasma. Further, provided are an electrostatic chuck device using such a composite sintered body for an electrostatic chuck and a method of manufacturing a composite sintered body for an electrostatic chuck. The composite sintered body for an electrostatic chuck is a composite sintered body including an insulating ceramic and silicon carbide, in which crystal grains of the silicon carbide are dispersed in at least one selected from the group consisting of a crystal grain boundary and a crystal grain of a main phase formed by sintering crystal grains of the insulating ceramic.
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Inventors:
Yoshiki Yoshioka
Hidaka High Nobuhiro
Kunimoto
Hidaka High Nobuhiro
Kunimoto
Application Number:
JP2017134914A
Publication Date:
December 05, 2018
Filing Date:
July 10, 2017
Export Citation:
Assignee:
Sumitomo Osaka Cement Co., Ltd.
International Classes:
C04B35/117; C04B35/577; H01L21/683
Domestic Patent References:
| JP5295352A | ||||
| JP5178657A | ||||
| JP61021965A | ||||
| JP61021964A | ||||
| JP9283606A | ||||
| JP2015019027A | ||||
| JP2014138061A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Suzuki Mitsuyoshi
Tadashi Takahashi
Suzuki Mitsuyoshi