Title:
セラミックス膜、半導体装置、圧電素子、およびアクチュエータ
Document Type and Number:
Japanese Patent JP4798397
Kind Code:
B2
Abstract:
A ceramic film comprises first crystals intermittently formed in
Inventors:
Eiji Natori
Ken Kijima
Koichi Koyama
Yuzo Tasaki
Ken Kijima
Koichi Koyama
Yuzo Tasaki
Application Number:
JP2008311925A
Publication Date:
October 19, 2011
Filing Date:
December 08, 2008
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
C04B35/00; C04B35/42; C04B35/45; C04B35/457; C04B35/465; C04B35/472; C04B35/475; C04B35/491; C04B35/493; C04B35/495; C04B35/497; C04B35/624; C23C14/08; C23C16/40; C23C18/12; C30B29/22; H01L21/316; H01L21/8246; H01L27/105; H01L41/09; H01L41/187; H01L41/22; H01L41/314; H01L41/317; H01L41/318; H01L41/39; H01L21/314
Domestic Patent References:
| JP2003002645A |
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Misa Nagata
Mitsue Obuchi
Misa Nagata