Title:
CERAMIC SUBSTRATE AND METHOD FOR PRODUCTION THEREOF
Document Type and Number:
Japanese Patent JP2009160840
Kind Code:
A
Abstract:
To provide a ceramic substrate restrained in the deformation of ceramic green sheets, and to provide a method for production thereof.
The ceramic substrate 1 consists of a ceramic laminate formed by stacking ceramic green sheets 2 having a predetermined thickness, pressurizing and sitering them. From the surface of the ceramic substrate 1 to the depth D1 the opening dimension of the cavity 5 is set to gradually become larger and from the depth D2 deeper than D1 to the depth D3 the opening dimension of the cavity 5 is set to gradually become smaller. Between the depths D1 and D2 the opening dimension of the cavity is set to become largest.
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Inventors:
SEKINO SHIRO
Application Number:
JP2008001259A
Publication Date:
July 23, 2009
Filing Date:
January 08, 2008
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
B28B11/00; H05K1/02; H05K3/46
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa
Previous Patent: JP2009160839
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