PURPOSE: To enhance the adhesive strength between a substrate and a coating film and maintain the excellent operation characteristics of the ceramic thin film over a long period by forming diffusion layers on the interfaces of a primer layer and the coating film, respectively, when the coating film such as TiN film is formed on the surface of the substrate through the primer layer.
CONSTITUTION: A primer Ti film 2 and then a thin film 3 comprising one of TiN, TiC and TiCN, e.g. TiN, are formed on the surface of a substrate 1 comprising a metal material by a coating method, and diffusion layers 4 are formed between the substrate 1 and the Ti film 2 and between the Ti film 2 and the TiN thin film 3. The diffusion layers 4 are layers in which the constituting elements (Ti and Fe in the substrate) have been diffused. The TiN thin film 3 and the diffusion layers 4 are formed e.g. by an ion plating method. When the primer Ti film 2 is coated on the surface of the substrate 1 and subsequently N2 gas is flowed for reacting the N2 with the Ti to coat the TiN thin film 3, the diffusion layers 4 are simultaneously formed. Thus, the reramic thin film suitably used for the sliding member of an operation mechanism is obtained.
KURI YUUJI
WATANABE MICHIO
