Title:
CERAMICS HEATER
Document Type and Number:
Japanese Patent JPH05174949
Kind Code:
A
Abstract:
PURPOSE: To provide a ceramics heater with rapid heating possible and high power density further with high heat equality.
CONSTITUTION: In a ceramics heater, foil of 30μm thickness of Fe-20Cr-5Al stainless steel is used to prepare a surface-shaped heating unit of 45×25mm size, 60Ω resistance by etching, and to interpose the unit by applying a 200g/cm2 pressure to an aluminum nitride sintered material of 50mm×30mm×1mm thickness and 150W/mK heat conductivity.
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Inventors:
MAEDA EIZO
HARITA AKIRA
HARITA AKIRA
Application Number:
JP34119291A
Publication Date:
July 13, 1993
Filing Date:
December 24, 1991
Export Citation:
Assignee:
KAWASAKI STEEL CO
International Classes:
C04B35/581; C04B35/58; H05B3/14; (IPC1-7): C04B35/58; H05B3/14
Attorney, Agent or Firm:
Yoshio Kosugi (1 person outside)