Title:
CERIUM-BASED ABRASIVE PARTICLE POWDER HAVING EXCELLENT PARTICLE SIZE DISTRIBUTION, SLURRY OF ABRASIVE CONTAINING THE PARTICLE POWDER AND METHOD FOR PRODUCING THE PARTICLE POWDER
Document Type and Number:
Japanese Patent JP3685481
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain an abrasive particle powder maintaining a sufficient polishing rate and having an excellent polished surface and improving washing properties of the abrasive particle powder remaining after polishing in polishing using a cerium-based abrasive particle powder.
SOLUTION: This abrasive particle powder comprises a cerium-based abrasive particle powder containing a cerium oxide in an amount of 30-80 wt.% based on rare earth oxides and satisfies the following formulae (1) and (2) when 10%, 50% and 90% particle diameters (μm) from the small particle diameter side are d10, d50 and d90 respectively in cumulative particle size distribution of particle size distribution measurement of the particle powder. 0.1≤d50≤3 (1) d90/d10≤15 (2).
Inventors:
Akifumi Ito
Mochizuki Naoyoshi
Shigeru Kuwahara
Hiroyuki Watanabe
Mochizuki Naoyoshi
Shigeru Kuwahara
Hiroyuki Watanabe
Application Number:
JP2000396533A
Publication Date:
August 17, 2005
Filing Date:
December 27, 2000
Export Citation:
Assignee:
Mitsui Mining & Smelting Co., Ltd.
International Classes:
B24B37/00; C09K3/14; H01L21/304; (IPC1-7): C09K3/14; B24B37/00
Domestic Patent References:
| JP11269455A | ||||
| JP7187613A | ||||
| JP5326469A | ||||
| JP10176164A | ||||
| JP2000273443A | ||||
| JP60035075A |
Attorney, Agent or Firm:
Daisuke Tanaka