To provide cerium oxide abrasive particles and a composition containing the abrasive particles.
There is provided a method of manufacturing an improved cerium oxide abrasive agent suitable for forming a slurry comosition which is suitable for a CMP process, wherein the cerium oxide abrasive agent is manufactured, by heat-treating a mixture of cerium precursors, under the condition of forming a yet larger secondary abrasive particle which is constituted by bonding of cerium oxide primary particles. This contributes to reducing the possibility that a mechanical strength is deteriorated due to the existence of incompletely oxidized cerium in the structure of the cerium oxide primary particles and/or secondary abrasive particles, thereby damaging the surface of a substrate during CMP process using the abrasive agent.
COPYRIGHT: (C)2006,JPO&NCIPI
Su Ken
Kim Man
Ginger scenery Bun
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Yasuo Nara
Katsuyuki Utani